陈首部,陆 轴,兰 椿.氧化锌薄膜的微观结构及其结晶性能研究[J].中南民族大学学报自然科学版,2017,(4):67-72
氧化锌薄膜的微观结构及其结晶性能研究
Microsructure and Crystalline Characteristics of Zinc Oxide Thin Films
  
DOI:
中文关键词: 氧化锌  薄膜  微观结构  结晶性能
英文关键词: zinc oxide  thin film  microstructure  crystalline characteristics
基金项目:湖北省自然科学基金资助项目(2011CDB418)
作者单位
陈首部,陆 轴,兰 椿 中南民族大学 电子信息工程学院武汉 430074 
摘要点击次数: 418
全文下载次数: 510
中文摘要:
      以普通玻璃作为衬底材料,采用射频磁控溅射方法制备了氧化锌(ZnO) 透明导电薄膜, 通过 X 射线衍射(XRD) 和 X 射线光电子能谱(XPS) 测试,研究了衬底温度对薄膜微观结构及其结晶性能的影响. 结果表明: 所制备的 ZnO 薄膜均为(002) 晶面择优取向生长的多晶薄膜,其微观结构和结晶性能与衬底温度密切相关.衬底温度对ZnO 薄膜的织构系数 TC(hkl)、平均晶粒尺寸、位错密度、晶格应变和晶格常数都具有不同程度的影响,当衬底温度为 800 K 时,ZnO 薄膜样品的织构系数 TC(002) 最高(4.929)、平均晶粒尺寸最大(20.91 nm)、位错密度最小( 2.289×1015 line·m-2 )、晶格应变最低(2.781×10-3),具有最高的(002) 晶面择优取向生长性和最佳的微观结构性能.
英文摘要:
      The transparent conducting oxide thin films of zinc oxide (ZnO) were deposited on glass substrates by radiofrequency magnetron sputtering method. The influence of substrate temperature on the mirostructure and crystalline characteristics of ZnO thin films was investigated by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS),respectively. The results indicate that the deposited thin films with the hexagonal crystal structure are polycrystalline and have a strongly preferred orientation of (002) plane.The mirostructure and crystalline characteristics of the thin films are observed to be subjected to the substrate temperature. When the substrate temperature is 800 K, the deposited ZnO sample exhibits the best crystalline and microstructural properties, with the highest texture coefficient of (002) plane of 4.929, the largest average grain size of 20.91 nm, the minimum dislocation density of 2.289×1015 line·m-2 and the lowest lattice strain of 2.781×10-3
查看全文   查看/发表评论  下载PDF阅读器
关闭