钟志有, 康 淮,龙 浩.镁钇合掺氧化锌薄膜的制备及其性能研究[J].中南民族大学学报自然科学版,2018,(1):66-72
镁钇合掺氧化锌薄膜的制备及其性能研究
Preparation and Properties of Magnesium and Yttrium Doped Zinc Oxide Thin Films
  
DOI:
中文关键词: 磁控溅射  掺杂氧化锌  薄膜  光学性质
英文关键词: magnetron sputtering  doped zinc oxide  thin films  optical properties
基金项目:湖北省自然科学基金资助项目(2011CDB418);中央高校基本科研业务费专项资金资助项目(CZP17002, CZW14019)
作者单位
钟志有1,2, 康 淮1,龙 浩1 1 中南民族大学 电子信息工程学院 武汉 430074
2 中南民族大学 智能无线通信湖北省重点实验室 武汉 430074 
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中文摘要:
      以镁钇掺杂的氧化锌(ZnO)陶瓷靶作为溅射靶材,采用射频磁控溅射技术在玻璃衬底上制备了镁钇合掺ZnO(MYZO)薄膜样品.通过 X 射线衍射仪和分光光度计的测试表征,研究了薄膜厚度对 MYZO 样品结构性质和光学性能的影响.结果表明:MYZO样品均为六角纤锌矿型的多晶结构,并且其择优取向生长特性明显受到薄膜厚度的影响,当薄膜厚度为 290 nm 时,MYZO 样品具有(002)择优取向生长特性.另外通过光学表征方法获得了 MYZO样品的光学能隙、 折射率和消光系数,结果显示:MYZO 样品的光学能隙大于未掺杂 ZnO 能隙, 其折射率均表现为正常色散特性,并且遵循 Wemple-DiDomenico 单振子色散模型.
英文摘要:
      The magnesium and yttrium doped zinc oxide (MYZO) thin films were deposited on glass substrates by radiofrequency magnetron sputtering technique, using the ceramic target fabricated by sintering the mixture of MgO, Y2O3 and ZnO nanometer powder. The influence of thickness on structure and optical properties of the deposited films was investigated by X-ray diffractometer and spectrophotometer.The results show that all the MYZO films are polycrystalline with a hexagonal structure,and that the thickness significantly affects the preferred growth orientation of the deposited films.When the thickness is 290 nm,the MYZO films have strong (002) peak and show obvious preferred growth orientation of (002).In addition,the direct optical bandgap, refractive index and extinction coefficient of the films were determined by optical characterization methods. It is observed that the direct optical bandgaps of the MYZO films are greater than that of the undoped ZnO.All the deposited films exhibit the normal dispersion relation in the visible region, and the refractive index dispersion curves of the films obey the single-oscillator Wemple-DiDomenico model.
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