钟志有,田雨,陆轴.钇和镁共掺杂ZnO薄膜的光学常数和介电性能[J].中南民族大学学报自然科学版,2020,39(5):500-505
钇和镁共掺杂ZnO薄膜的光学常数和介电性能
Optical constant and dielectric properties of yttrium-magnesium co-doped ZnO thin films
  
DOI:10.12130/znmdzk.20200510
中文关键词: 掺杂氧化物;薄膜  光学性能
英文关键词: doped zinc oxide  thin films  optical properties
基金项目:湖北省自然科学基金资助项目(2011CDB418)
作者单位
钟志有 中南民族大学 电子信息工程学院智能无线通信湖北省重点实验室武汉430074 
田雨 中南民族大学 电子信息工程学院智能无线通信湖北省重点实验室武汉430074 
陆轴 中南民族大学 电子信息工程学院智能无线通信湖北省重点实验室武汉430074 
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中文摘要:
      以钇和镁共掺杂的氧化锌(ZnO:Y-Mg)陶瓷靶为溅射源,利用射频磁控溅射工艺在石英衬底上制备了ZnO:Y-Mg薄膜,基于紫外-可见分光光度计测量的透射率数据,通过光谱拟合方法计算了不同溅射时间时薄膜样品的光学参数. 结果表明,溅射时间对ZnO:Y-Mg薄膜的折射率、消光系数、介电常数等具有不同程度的影响,所有样品的折射率在可见光波段均表现为正常色散特性,其变化关系符合Sellmeier色散模型.
英文摘要:
      Yttrium-magnesium co-doped zinc oxide (ZnO:Y-Mg) thin films were deposited on the glass quartz substrates by RF magnetron sputtering technique, using the sintered ceramic target of ZnO mixed with Y2O3 and MgO as the sputtering source material. The optical transmittance data of samples were measured by ultraviolet-visible spectrophotometer. The optical parameters including refractive index, extinction coefficient and dielectric constant were determined by the method of optical spectrum fitting. The results indicate that the refractive index, extinction coefficient and dielectric constant were influenced by sputtering time in different extent. All the samples exhibit the normal dispersion characteristic in the visible region, and the refractive index dispersion curves of the thin films obey the Sellmeier’s dispersion model.
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