钟志有, 康 淮, 陆 轴, 龙 路.掺镁氧化锌薄膜结构及其光学性质的研究[J].中南民族大学学报自然科学版,2017,(1):64-70
掺镁氧化锌薄膜结构及其光学性质的研究
Structure and Optical Properties of Magnesium-Doped Zinc Oxide Thin Films
  
DOI:
中文关键词: 磁控溅射  氧化锌  晶体结构  光学性质
英文关键词: magnetron sputtering  zinc oxide thin films  structure  optical properties
基金项目:国家自然科学基金资助项目(11504436) ; 湖北省自然科学基金资助项目(2015CFB364) ; 中央高校基本科研业务费专项资金资助项目(CZW14019,CZW15045)
作者单位
钟志有, 康 淮, 陆 轴, 龙 路 中南民族大学 电子信息工程学院 智能无线通信湖北省重点实验室 武汉 430074 
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中文摘要:
      以氧化镁(MgO)掺杂的氧化锌(ZnO) 陶瓷靶作为溅射靶材,采用射频磁控溅射方法在玻璃衬底上制备了掺镁ZnO(ZnO:Mg) 薄膜样品.通过X射线衍射仪和可见-紫外光分光光度计的测试表征,研究了溅射时间对 ZnO:Mg 薄膜晶体结构和光学性质的影响. 结果表明: ZnO:Mg 薄膜的结构和性能与溅射时间密切相关.随着溅射时间的增加,ZnO:Mg 薄膜(002) 晶面的织构系数减小、(110) 晶面的织构系数增大, 对应的可见光波段的平均透过率降低.溅射时间为 15 min 时,ZnO: Mg薄膜样品具有最佳的(002) 择优取向生长特性和最好的透光性能.同时 ZnO:Mg薄膜样品的禁带宽度随溅射时间增加而单调增大.与未掺杂 ZnO 薄膜相比,所有 ZnO:Mg 薄膜样品的禁带宽度均变宽.
英文摘要:
      The magnesium-doped zinc oxide ( ZnO: Mg) thin films were deposited on glass substrates by radio-frequency magnetron sputtering technique using the ceramic target fabricated by sintering the mixture of ZnO and MgO nanometer powder. The influence of sputtering time on structure and optical properties of the deposited films was investigated by X-ray diffractometer and UV-Visible spectrophotometer. The results show that the grain growth, structure and optical properties of the thin films are closely related to the sputtering time. As the sputtering time increases, the texture coefficient of ( 002) plane decreases, the texture coefficient of (110) plane increases, and the average transmittance in the visible range decreases. The thin film deposited at the sputtering time of 15 min has the best crystal quality and the highest optical transmittance. Meanwhile, the band gaps of the deposited films are observed to increase monotonically when the sputtering time increases. Compared with the band gap of undoped ZnO thin film, the direct band gaps of all the deposited thin films are broadened.
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