镓镁锌氧化物薄膜的磁控溅射方法制备及其表征
Preparation and Characterization of Gallium Magnesium Zinc Oxide Thin Films by Magnetron Sputtering Method
投稿时间:2018-07-19  修订日期:2018-07-19
DOI:
中文关键词: 磁控溅射  掺杂氧化锌  透明导电膜
英文关键词: magnetron  sputtering, doped  zinc oxide, transparent  conductive film
基金项目:湖北省自然科学基金资助项目(2011CDB418); 中央高校基本科研业务费专项资金资助项目(CZP17002, CZW14019)
作者单位E-mail
顾锦华 中南民族大学 实验教学与实验室管理中心 jinhwagu@163.com 
陆 轴 中南民族大学 电子信息工程学院  
陈首部 中南民族大学 电子信息工程学院  
钟志有 中南民族大学 电子信息工程学院  
摘要点击次数: 297
全文下载次数: 
中文摘要:
      采用射频磁控溅射方法制备了镓镁锌氧化物(GaMgZnO)透明导电薄膜,通过X射线衍射仪、四探针仪和分光光度计的测试分析,研究了沉积温度对GaMgZnO薄膜微观结构和电光性能的影响。结果显示:所制备的样品均为六角纤锌矿结构的多晶薄膜并具有c轴择优取向生长特点,其结晶质量和电光性能与沉积温度密切相关。当沉积温度为550SK时,GaMgZnO薄膜的晶粒尺寸最大(51.72Snm)、晶格应变最小(1.11′10-3)、位错密度(3.73×1014Sline×m-2)和电阻率最低(1.63×10-3SW?cm)、可见光区平均透过率(82.41%)和品质因数最大(5.06×102SW-1?cm-1),具有最好的结晶质量和光电综合性能。另外采用光学表征方法获得了薄膜样品的光学能隙,结果表明由于受Burstein-Moss效应的影响,GaMgZnO薄膜的光学能隙均大于未掺杂ZnO的数值。
英文摘要:
      Gallium magnesium zinc oxide (GaMgZnO) transparent conductive thin films were prepared by magnetron sputtering method. The influence of deposition temperature on the structural and electro-optical properties of the thin films was studied by X-ray diffraction (XRD), four-point probe and ultraviolet-visible spectrometer. The results show that all the thin films are polycrystalline with a hexagonal structure and have a preferred orientation along the c-axis perpendicular to the substrate. The deposition temperature significantly affects the crystal quality and electro-optical properties of thin films. When the deposition temperature is at 550SK, the GaMgZnO thin film has the best crystalline quality and electro-optical properties, with the maximum grain size (51.72Snm), the minimum lattice strain (1.11′10-3), the lowest dislocation density (3.73×1014Sline×m-2) and resistivity (1.63×10-3SW?cm), and the highest average visible transmittance (82.41%) and figure of merit (5.06×102SW-1?cm-1). Furthermore, the optical energy gap of the deposited films were determined and observed to be larger than that of undoped ZnO due to Moss-Burstein effect.
View Fulltext   查看/发表评论  下载PDF阅读器
关闭